Polishing machine SPP series

Feature

SPP9600 Pitch Polisher
  1. Applications:
    • Used for products requiring angstrom-level flatness and a mirror-like surface, such as optical flats, high-accuracy reflection mirrors, optical glass, and master bases for measurement tools.
  2. Key Features:
    • Granite Table: Specially designed granite reduces heat expansion and maintains long-term machine stability.
    • Dedicated Table Conditioner: Ensures optimal working conditions for the polishing process.
    • High-Accuracy Double Column Facing Unit: Provides precision and consistency for achieving extreme flatness.

SPP3800 High-Accuracy Oscar Type Polisher

  1. Applications:
    • World's only high-accuracy Oscar-type polisher designed for G10-size photomasks.
  2. Key Features:
    • Work Head: The work head tilts up to 105°, making it easy to replace the workpiece and prevent scratches.
    • Anti-Rust & Dust-Preventing Design: Polishing parts are made from anti-rust material, and the design prevents dust accumulation.
    • Granite Polishing Table: Reduces heat expansion and prevents flatness deviation during the polishing process.
    • Dual-Sided Slurry Distribution: Slurry is supplied from both sides of the work edge and the center of the pad for stable surface polishing.
    • Oscillation Function: The work head can oscillate radially via an oscillation arm with elevating functionality, driven by an AC servo motor. The oscillation speed, angle, and pressure can be adjusted during the process for optimal results.